TEMPERATURES ARISING ON SURFACE OF POLYMERS DURING THEIR ETCHING IN HIGH-FREQUENCY OXYGEN DISCHARGE PLASMA

被引：0
|
作者：
PETROVA, II [1 ]
CHALYKH, AE [1 ]
AVGANOV, A [1 ]
LUKYANOV.VM [1 ]
机构：
[1] ACAD SCI USSR,PHYS CHEM INST,MOSCOW,USSR
来源：
VYSOKOMOLEKULYARNYE SOEDINENIYA SERIYA A | 1973年 / 15卷 / 06期
关键词：
D O I：
暂无
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
引用
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页码：1421 / 1425
页数：5
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