TEMPERATURES ARISING ON SURFACE OF POLYMERS DURING THEIR ETCHING IN HIGH-FREQUENCY OXYGEN DISCHARGE PLASMA

被引：0

作者：

PETROVA, II ^{[1
]}

CHALYKH, AE ^{[1
]}

AVGANOV, A ^{[1
]}

LUKYANOV.VM ^{[1
]}

机构：

[1] ACAD SCI USSR,PHYS CHEM INST,MOSCOW,USSR

来源：

VYSOKOMOLEKULYARNYE SOEDINENIYA SERIYA A | 1973年 / 15卷 / 06期

关键词：

D O I：

暂无

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：1421 / 1425

页数：5

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