SCANNING-X-RAY MICROPROBE WITH BRAGG-FRESNEL MULTILAYER LENS

被引：0
|
作者：
CHEVALLIER, P
DHEZ, P
LEGRAND, F
ERKO, A
VIDAL, B
机构：
[1] RUSSIAN ACAD SCI,INST MICROELECTR TECHNOL,CHERNOGOLOVKA 142432,RUSSIA
[2] FAC SCI & TECH ST JEROME,LOE,F-13397 MARSEILLE,FRANCE
来源：
INSTITUTE OF PHYSICS CONFERENCE SERIES | 1993年 / 130期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The preliminary design of a fluorescence X-Ray scanning microprobe with submicron resolution was tested at the LURE (France). A linear multilayer Bragg- Fresnel lens has been used for vertical focussing of the white X-ray synchrotron beam. In the energy range 6Kev to 14KeV, and with a bandwidth of deltalambda/lambda almost-equal-to 10(-2), the vertical spot size checked with a photographic plate was 1.7 mum. At 10KeV input photon energy the Ni(Ka) fluorescence signal registered during a knife-edge test with a test object shows a 3 mum resolution.
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页码：617 / 620
页数：4
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