MOLECULAR-DYNAMICS SIMULATION OF THIN-FILM FORMATION BY ENERGETIC CLUSTER IMPACT(ECI)

被引：52
|
作者：
HABERLAND, H
INSEPOV, Z
MOSELER, M
机构：
[1] UNIV FREIBURG,FAK PHYS,W-7800 FREIBURG,GERMANY
[2] KAZAKH POLYTECH INST,ALMA ATA,KAZAKHSTAN
来源：
ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS | 1993年 / 26卷 / 1-4期
关键词：
D O I：
10.1007/BF01429153
中图分类号：
O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号：
070203 ; 070304 ; 081704 ; 1406 ;
摘要：
Langevin Molecular Dynamics Simulations have been performed in order to understand thin film formation by impact of energetic clusters. The impact of Mo1024 clusters on a Mo surface is simulated at kinetic energies between 1 and 10 eV per atom. The results are in qualitative agreement with the experiments. Due to the high temperature induced locally at the impact zone, the method can be used to form compact, smooth, and strongly adhering thin films on room temperature substrates.
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页码：229 / 231
页数：3
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