PREPARATION AND PROPERTIES OF PBTIO3 AND PB(SC0.5TA0.5)O3 THIN-FILMS BY SOL-GEL PROCESSING

被引：8

作者：

PATEL, A ^{[1
]}

SHORROCKS, NM ^{[1
]}

WHATMORE, RW ^{[1
]}

机构：

[1] GEC MARCONI MAT TECHNOL LTD,TOWCESTER NN12 8EQ,NORTHANTS,ENGLAND

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1991年 / 38卷 / 06期

关键词：

D O I：

10.1109/58.108868

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Crack-free and dense PbTiO3 films 1-2-mu-m thick were prepared by spinning a sol-gel derived solution onto an appropriate substrate, and firing and annealing the film at temperatures of 750-800-degrees-C. The electrical properties of the films were studied as a function of temperature, frequency and dc bias. Also, crack-free films of Pb(Sc0.5Ta0.5)O3 with an average grain size of 0.4-mu-m were prepared using a novel two-stage process. Films 4-mu-m thick had moderately high relative permittivities, low dissipation factors and high resistivity.

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页码：672 / 676

页数：5

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