TIME-RESOLVED STUDY OF OXYGEN REACTION ON SI(100) SURFACES USING PULSED MOLECULAR-BEAM REACTIVE SCATTERING

被引：1
|
作者：
YU, ML
ELDRIDGE, BN
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574709
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：525 / 526
页数：2
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