TWO-DIMENSIONAL SIMULATION OF ION-IMPLANTATION PROFILES USING A PERSONAL-COMPUTER

被引：7

|

作者：

BARTHEL, A ^{[1
]}

LORENZ, J ^{[1
]}

RYSSEL, H ^{[1
]}

机构：

[1] UNIV ERLANGEN NURNBERG,LEHRSTUHL ELEKTR BAUELEMENTE,D-8520 ERLANGEN,FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90193-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：312 / 316

页数：5

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