SHORT-CHANNEL MOSFETS WITH SUPERIOR GATE DIELECTRICS FABRICATED USING MULTIPLE RAPID THERMAL-PROCESSING

被引：0
|
作者：
SHIH, DK
KWONG, DL
LEE, S
机构：
[1] UNIV TEXAS,DEPT ELECT ENGN & COMP SCI,MICROELECTR RES CTR,AUSTIN,TX 78712
[2] NCR CORP,DIV MICROELECTR,COLORADO SPRINGS,CO 80916
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 12期
关键词：
D O I：
10.1109/16.8854
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：2438 / 2438
页数：1
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