共 50 条
- [21] Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics APPLIED PHYSICS REVIEWS, 2017, 4 (01):
- [22] ADVANCES IN MULTILAYER X-RAY EUV OPTICS - SYNTHESIS, PERFORMANCE AND INSTRUMENTATION EUV, X-RAY, AND GAMMA-RAY INSTRUMENTATION FOR ASTRONOMY AND ATOMIC PHYSICS, 1989, 1159 : 638 - 654
- [23] Beamline for metrology of x-ray/EUV optics at the advanced light source GRAZING INCIDENCE AND MULTILAYER X-RAY OPTICAL SYSTEMS, 1997, 3113 : 214 - 221
- [24] Developments of EUV/X-ray wavefront sensors and adaptive optics at Imagine Optic ADAPTIVE X-RAY OPTICS V, 2018, 10761
- [25] Wavefront metrology for EUV projection optics by soft x-ray interferometry in the NewSUBARU SYNCHROTRON RADIATION INSTRUMENTATION, PTS 1 AND 2, 2007, 879 : 1520 - 1523
- [26] Reflective optics for EUV/x-ray sources at Thales SESO: possibilities and perspectives ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS IX, 2020, 11492
- [27] Optimisation of depth-graded multilayer designs for EUV and X-ray optics ADVANCES IN X-RAY OPTICS, 2001, 4145 : 243 - 253
- [28] Fabrication and metrology of diffraction limited soft x-ray optics for the EUV microlithography ADVANCES IN MIRROR TECHNOLOGY FOR X-RAY, EUV LITHOGRAPHY, LASER, AND OTHER APPLICATIONS, 2004, 5193 : 18 - 28
- [29] PROCEEDINGS OF SPIE Advances in X-Ray/EUV Optics and Components IX Introduction ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS IX, 2014, 9207