METHOD OF MEASURING SURFACE ELECTRIC CHARGE-DISTRIBUTIONS

被引：2

作者：

CHARPAK, G

CORDURIE, G

LEWINER, J

MORISSEAU, D

机构：

来源：

JOURNAL DE PHYSIQUE III | 1993年 / 3卷 / 11期

关键词：

D O I：

10.1051/jp3:1993267

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method of measuring the charge distribution on a dielectric or semiconductor surface is described. The electronic measuring system and the sweeping apparatus are fast enough (5 lines of 400 points by second) to enable charge imaging. Experiments have been performed in various fields : X ray and gamma ray imaging, detection of alpha particles, evolution of charge distribution on semiconductor related substrates.

引用

页码：2149 / 2161

页数：13

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