MAGNETIC ANALYSIS OF QUADRUPOLE LENS FOR MEV ION MICROPROBE

被引：8
|
作者：
INOUE, K
TAKAI, M
ISHIBASHI, K
KAWATA, Y
NAMBA, S
机构：
[1] OSAKA UNIV, FAC ENGN SCI, TOYONAKA, OSAKA 560, JAPAN
[2] OSAKA UNIV, EXTREME MAT RES CTR, TOYONAKA, OSAKA 560, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 07期
关键词：
D O I：
10.1143/JJAP.28.L1307
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L1307 / L1309
页数：3
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