AEROSOL-ASSISTED CHEMICAL-VAPOR-DEPOSITION (AACVD) OF METALS AND METAL-ALLOYS

被引：0
|
作者：
XU, CY
CORBITT, TS
HAMPDENSMITH, MJ
KODAS, TT
机构：
[1] UNIV NEW MEXICO,DEPT CHEM,ALBUQUERQUE,NM 87131
[2] UNIV NEW MEXICO,DEPT CHEM ENGN,ALBUQUERQUE,NM 87131
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1994年 / 208卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：325 / INOR
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