Laser-assisted micromachining of large-area 3D metallic microparts

被引：0
|
作者：
Stephen, A [1 ]
Lilienkamp, T [1 ]
Metev, S [1 ]
Sepold, G [1 ]
机构：
[1] BIAS, Bremen, Germany
来源：
PRECISION ENGINEERING, NANOTECHNOLOGY, VOL. 2 | 1999年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Micromachining of metallic microparts by laser-induced chemical etching in liquids has been investigated using a cw-Nd:YAG laser. The feasibility of this process for a direct microstructuring of metals with defined structure shape was demonstrated. The direct processing of the workpiece resulted in a microstructuring with high precision and lateral resolution and without debris. In addition, for large-area micromachining of metals, an ablative microstructuring of polymer substrates in a specially developed scanning optical projection scheme was performed. Afterwards, the as microstructured polymer substrate can be converted into a negativ metallic form by electroplating.
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页码：20 / 23
页数：4
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