SILICON-NITRIDE COATINGS ON COPPER

被引：3
|
作者：
AUDISIO, SC
LEIDHEIS.H
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1972年 / 119卷 / 04期
关键词：
D O I：
10.1149/1.2404218
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：408 / &
相关论文
共 50 条
  • [1] EFFECT OF SILICON-NITRIDE ON THE PROCESS OF DEPOSITION OF COPPER CHEMICAL COATINGS
    GUSEVA, IV
    MASHCHENKO, TS
    BORISENKO, AI
    [J]. INORGANIC MATERIALS, 1985, 21 (09) : 1377 - 1379
  • [2] SPUTTERED SILICON-NITRIDE COATINGS FOR WEAR PROTECTION
    GRILL, A
    ARON, PR
    [J]. THIN SOLID FILMS, 1982, 96 (01) : 25 - 30
  • [3] TRIBOLOGY OF SILICON-NITRIDE SILICON-NITRIDE AND SILICON-NITRIDE STEEL SLIDING PAIRS
    SUTOR, PA
    [J]. AMERICAN CERAMIC SOCIETY BULLETIN, 1983, 62 (11): : 1246 - 1246
  • [4] WETTABILITY OF SILICON-NITRIDE BY ALUMINUM, COPPER AND SILVER
    NAKA, M
    KUBO, M
    OKAMOTO, I
    [J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1987, 6 (08) : 965 - 966
  • [5] SYNTHESIS OF SILICON-NITRIDE AND PROPERTIES OF SILICON-NITRIDE SHAPES
    MUKERJI, J
    DHARGUPTA, KK
    BISWAS, SK
    [J]. INDIAN JOURNAL OF TECHNOLOGY, 1978, 16 (04): : 156 - 160
  • [6] SILICON-NITRIDE
    AULT, NN
    YECKLEY, RL
    [J]. AMERICAN CERAMIC SOCIETY BULLETIN, 1993, 72 (06): : 117 - 118
  • [7] SILICON-NITRIDE
    AULT, NN
    HARTLINE, SD
    [J]. AMERICAN CERAMIC SOCIETY BULLETIN, 1989, 68 (05): : 1063 - 1064
  • [8] SILICON-NITRIDE
    AUTL, NN
    YECKLEY, RL
    [J]. AMERICAN CERAMIC SOCIETY BULLETIN, 1994, 73 (06): : 129 - &
  • [9] SILICON-NITRIDE
    AULT, NN
    YECKLEY, RL
    [J]. AMERICAN CERAMIC SOCIETY BULLETIN, 1992, 71 (05): : 816 - 816
  • [10] SILICON-NITRIDE
    AULT, NN
    YECKLEY, RL
    [J]. AMERICAN CERAMIC SOCIETY BULLETIN, 1995, 74 (06): : 153 - 155
12345