WETTABILITY OF SILICON-NITRIDE BY ALUMINUM, COPPER AND SILVER

被引：26
|
作者：
NAKA, M
KUBO, M
OKAMOTO, I
机构：
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1987年 / 6卷 / 08期
关键词：
D O I：
10.1007/BF01729884
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：965 / 966
页数：2
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