FABRICATION AND PROPERTIES OF FREESTANDING C60 MEMBRANES

被引：33
|
作者：
EOM, CB
HEBARD, AF
TRIMBLE, LE
CELLER, GK
HADDON, RC
机构：
来源：
SCIENCE | 1993年 / 259卷 / 5103期
关键词：
D O I：
10.1126/science.259.5103.1887
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
Van der Waals forces that bind C60 molecular solids are found to be sufficiently strong to allow the reproducible fabrication of free-standing C60 membranes on (100) silicon wafers. Membranes, 2000 to 6000 angstroms thick, were fabricated by a modified silicon micromachining process and were found to be smooth, flat, and mechanically robust. An important aspect of the silicon-compatible fabrication procedure is the demonstration that C60 films can be uniformly and nondestructively thinned in a CF4 plasma. Young's modulus and fracture strength measurements were made on membranes with areas larger than 6 millimeters by 6 millimeters. It may be possible to use C60 membranes for physical property measurements and applications.
引用
收藏
页码：1887 / 1890
页数：4
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