UV LASER-INDUCED DEPOSITION OF METAL-FILMS

被引：12

|

作者：

COOMBE, RD

WODARCZYK, FJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 09期

关键词：

D O I：

10.1063/1.92069

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：846 / 848

页数：3

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