PULSED LASER ABLATIVE DEPOSITION OF THIN METAL-FILMS

被引：50
|
作者：
MOGYOROSI, P
SZORENYI, T
BALI, K
TOTH, Z
HEVESI, I
机构：
来源：
APPLIED SURFACE SCIENCE | 1989年 / 36卷 / 1-4期
关键词：
D O I：
10.1016/0169-4332(89)90909-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
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页码：157 / 163
页数：7
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