USE OF NUCLEAR-REACTIONS AND SIMS FOR QUANTITATIVE DEPTH PROFILING OF HYDROGEN IN AMORPHOUS SILICON

被引：57
|
作者：
CLARK, GJ
WHITE, CW
ALLRED, DD
APPLETON, BR
MAGEE, CW
CARLSON, DE
机构：
[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830
[2] RCA,PRINCETON,NJ 08540
来源：
APPLIED PHYSICS LETTERS | 1977年 / 31卷 / 09期
关键词：
D O I：
10.1063/1.89787
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：582 / 585
页数：4
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