SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH SIMULTANEOUS ELECTRON-PROBE DIAMETER DETERMINATION

被引：0
|
作者：
NOVIKOV, YA
RAKOV, AV
STEKOLIN, IY
机构：
来源：
MEASUREMENT TECHNIQUES USSR | 1994年 / 37卷 / 06期
关键词：
D O I：
10.1007/BF00978333
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A method is proposed for calibrating a scanning electron microscope SEM by means of a slot-type linear measure, which enables one to determine simultaneously all the main parameters needed for linear measurements: video image magnification, electron-probe diameter, and the correction parameter for deriving the true sizes of relief elements from the distances between video signal peaks.
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页码：710 / 713
页数：4
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