SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH SIMULTANEOUS ELECTRON-PROBE DIAMETER DETERMINATION

被引：0

作者：

NOVIKOV, YA

RAKOV, AV

STEKOLIN, IY

机构：

来源：

MEASUREMENT TECHNIQUES USSR | 1994年 / 37卷 / 06期

关键词：

D O I：

10.1007/BF00978333

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method is proposed for calibrating a scanning electron microscope SEM by means of a slot-type linear measure, which enables one to determine simultaneously all the main parameters needed for linear measurements: video image magnification, electron-probe diameter, and the correction parameter for deriving the true sizes of relief elements from the distances between video signal peaks.

引用

页码：710 / 713

页数：4

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