CRYSTAL MELT INTERFACE SHAPE OF CZOCHRALSKI-GROWN LARGE DIAMETER GERMANIUM-CRYSTALS

Crystal-melt interface shapes of 100 to 200 mm diameter <111〉 Ge grown by the Czochralski technique have been examined using the method of fast withdrawal from the melt. Initially, the interface shape is convex, then transforms gradually into a sigmoidal shape, becomes nearly planar at about one third of the final crystal length and, finally assumes a concave profile with progressively increasing curvature. The nearly planar interface has a double-facet structure, with an annular facet at the edge of the crystal in addition to the central (111) facet. Formation of the annular facet is accompanied by a giant oscillation of the pull rate when the maximum average pull rate is exceeded. Such oscillation is detrimental to crystal quality, since it introduces a region of high dislocation density. An average pull rate maximum of 2 cm/h has been found to allow for a smooth growth of 200 mm diameter crystals. The origin of the pull rate perturbation is discussed in terms of an instantaneous change in the equilibrium shape of the meniscus. The overall interface evolution is compared with theoretical results. © 1990, Elsevier Science Publishers B.V. (North-Holland). All rights reserved.