LEAK DETECTION IN 10-13 TORR ALUMINUM VACUUM-SYSTEMS

被引：3

作者：

WATANABE, F ^{[1
]}

ISHIMARU, H ^{[1
]}

机构：

[1] NATL LAB HIGH ENERGY PHYS,TSUKUBA,IBARAKI 305,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 03期

关键词：

D O I：

10.1116/1.576670

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

10 −13Tonr aluminum vacuum systems with sputter ion pumps, titanium sublimation pumps, and roughing pumps consisting of turbobacked, turbomolecular pumps have been completed. Leak detection has been accomplished by means of the buildup method of helium monitored with a quadrupole residual gas analyzer. The minimum detectable leak rate is below 2 × 10−15Torr /7s. Most leaks below IX 10−10Torr 77s were found in flange joints with aluminum A1G50 H18 gaskets. However, few leaks occurred in flange joints with aluminum A105O H24 gaskets or in feedthroughs, liquid nitrogen shrouds, aluminum alloy-stainless steel transitions, view ports, or electron beam welded parts. © 1990, American Vacuum Society. All rights reserved.

引用

页码：2795 / 2797

页数：3

共 39 条

[31] Ultra-high vacuum leak detection technology with the lower limit of 10-16Pam3/s for nano devices
Lu Yaowen
Dong Yunning
Chen Aqin
Qi Jing
Cha Liangzhen
2017 30TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2017, : 74 - 75
[32] Proceedings of the International Workshop on "Optical Properties of 2D Systems with Interacting Carriers" Warsaw, Poland, June 10-13, 2004 - Preface
Kossacki, P
Caj, J
ACTA PHYSICA POLONICA A, 2004, 106 (03)
[33] STRUCTURE-ACTIVITY RELATIONSHIP OF NEW 10-13 MEMBERED OXYGEN-NITROGEN HETEROCYCLIC-SYSTEMS CONTAINING 2 AROMATIC RINGS
WALCZYNSKI, K
GLINKA, R
STEPIEN, A
OLSZAK, T
SABATINO, P
PHARMAZIE, 1992, 47 (06): : 409 - 411
[34] 11th International Conference on Pediatric Mechanical Circulatory Support Systems and Pediatric Cardiopulmonary Bypass, Verona, Italy, June 10-13, 2015 Abstracts
不详
ARTIFICIAL ORGANS, 2015, 39 (05) : A1 - A25
[35] AC (50 HZ) AND DC ELECTRICAL BREAKDOWN OF VACUUM GAPS AND WITH VARIATION OF AIR-PRESSURE IN RANGE 10-9 -10-2 TORR USING OFHC COPPER, NICKEL, ALUMINUM, AND NIOBIUM PARALLEL PLANAR ELECTRODES
HACKAM, R
ALTCHEH, L
JOURNAL OF APPLIED PHYSICS, 1975, 46 (02) : 627 - 636
[36] Mini special issue on the 2004 International Symposium on Signals, Systems, and Electronics (ISSSE'04) in Linz, Austria - ISSSE '04 - August 10-13, 2004 - Linz, Austria
Springer, A
Huemer, M
AEU-INTERNATIONAL JOURNAL OF ELECTRONICS AND COMMUNICATIONS, 2005, 59 (05) : 267 - 267
[37] First detection of transitions in the second quadrupole overtone band of nitrogen near 1.44 μm by CW-CRDS with 6 x 10-13 cm-1 sensitivity
Kassi, Samir
Gordon, Iouli E.
Campargue, Alain
CHEMICAL PHYSICS LETTERS, 2013, 582 : 6 - 9
[38] Controlled comparison of BACTEC 13A, MYCO/F LYTIC, BacT/ALERT MB, and ISOLATOR 10 systems for detection of mycobacteremia
Crump, JA
Tanner, DC
Mirrett, S
McKnight, CM
Reller, LB
JOURNAL OF CLINICAL MICROBIOLOGY, 2003, 41 (05) : 1987 - 1990
[39] Proceedings of the 4th International Workshop on Detection, Classification and Localization of Marine Mammals using Passive Acoustics and 1st International Workshop on Density Estimation of Marine Mammals Using Passive Acoustics, University of Pavia, Collegio Cairoli, Italy, September 2009, 10-13
Pavan, Gianni
Adam, Olivier
Thomas, Len
APPLIED ACOUSTICS, 2010, 71 (11) : 991 - 993

← 1 2 3 4 →