CHARGE TRANSPORT AND TRAPPING CHARACTERISTICS IN THIN NITRIDE OXIDE STACKED FILMS

被引:18
|
作者
YOUNG, KK
HU, CM
OLDHAM, WG
机构
[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720
[2] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720
关键词
D O I
10.1109/55.9294
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:616 / 618
页数:3
相关论文
共 50 条
  • [1] Charge transport and trapping characteristics in thin nitride-oxide stacked films
    Young, K.K.
    Hu, Chenming
    Oldham, William G.
    Electron device letters, 1988, 9 (11): : 616 - 618
  • [2] CHARGE TRAPPING AND DETRAPPING PHENOMENA IN THIN OXIDE NITRIDE OXIDE STACKED FILMS
    LEE, SK
    CHEN, JH
    KU, YH
    KWONG, DL
    NGUYEN, BY
    TENG, KW
    SOLID-STATE ELECTRONICS, 1988, 31 (10) : 1501 - 1503
  • [3] CHARGE TRANSPORT AND TRAPPING MODEL FOR SCALED NITRIDE OXIDE STACKED FILMS
    YOUNG, KK
    HU, C
    OLDHAM, WG
    APPLIED SURFACE SCIENCE, 1987, 30 (1-4) : 171 - 179
  • [4] Charge transport in thin interpoly nitride/oxide stacked films
    De Salvo, B
    Ghibaudo, G
    Pananakakis, G
    Guillaumot, B
    Reimbold, G
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (05) : 2751 - 2758
  • [5] PROPERTIES OF THIN OXIDE-NITRIDE-OXIDE STACKED FILMS
    THANH, LD
    BALK
    JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (02) : 155 - 159
  • [6] CHARGE TRAPPING AND RETENTION IN ULTRA-THIN OXIDE NITRIDE OXIDE STRUCTURES
    OLIVO, P
    WEINBERG, ZA
    STEIN, KJ
    WEN, DS
    SOLID-STATE ELECTRONICS, 1991, 34 (06) : 609 - 611
  • [7] Temperature dependence of transport and trapping properties of oxide-nitride-oxide dielectric films
    Kies, R
    Ghibaudo, G
    Pananakakis, G
    Reimbold, G
    SOLID-STATE ELECTRONICS, 1997, 41 (07) : 1041 - 1049
  • [8] Charge transport in thin hafnium and zirconium oxide films
    Islamov D.R.
    Gritsenko V.A.
    Chin A.
    Islamov, D.R. (damir@isp.nsc.ru), 1600, Allerton Press Incorporation (53): : 184 - 189
  • [9] INFLUENCES OF PROCESSING CHEMISTRY OF SILICON-NITRIDE FILMS ON THE CHARGE TRAPPING BEHAVIOR OF OXIDE CVD-NITRIDE OXIDE CAPACITORS
    NGUYEN, BY
    TOBIN, PJ
    TENG, KW
    TOMPKINS, HG
    CHANG, KM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) : 776 - 777
  • [10] Study of the charge transport characteristics of dendrimer molecular thin films
    Li, J. C.
    Han, N.
    Wang, S. S.
    Ba, D. C.
    THIN SOLID FILMS, 2011, 519 (15) : 5234 - 5237