AN IN-SITU SENSOR FOR MONITORING MOLECULAR AND PHYSICAL PROPERTY CHANGES DURING FILM FORMATION

被引:0
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作者
KRANBUEHL, DE [1 ]
HOOD, D [1 ]
BARKSDALE, R [1 ]
机构
[1] COLL WILLIAM & MARY,WILLIAMSBURG,VA 23187
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O6 [化学];
学科分类号
0703 ;
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页码:98 / PMSE
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