CHARACTERIZATION OF LASER-NITRIDED IRON AND SPUTTERED IRON NITRIDE FILMS

被引:70
|
作者
SCHAAF, P
ILLGNER, C
NIEDERDRENK, M
LIEB, KP
机构
[1] II. Physikalisches Institut, Universität Göttingen, Göttingen, D-37073
来源
HYPERFINE INTERACTIONS | 1995年 / 95卷 / 1-4期
关键词
D O I
10.1007/BF02146315
中图分类号
O64 [物理化学(理论化学)、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号
070203 ; 070304 ; 081704 ; 1406 ;
摘要
Laser-nitriding may be a promising technique for substituting conventional nitriding processes. We have irradiated pure iron with pulses of an excimer laser and achieved high nitrogen contents in a thin surface layer. We found that the nitrogen is dissolved into gamma-Fe, leading to a large amount of retained austenite. This was also verified by X-ray diffraction (XRD) measurements. Three subspectra can be resolved in the Mossbauer spectra (CEMS) for this nitrogen austenite. The nitrogen concentration can be calculated in terms of site occupation, indicating a content as high as 16(1) at%, which is consistent with the results of Rutherford backscattering spectroscopy (RES), resonant nuclear reaction analysis (RNRA) and Auger electron spectroscopy (AES) measurements. This is more than the solubility limit for gamma-Fe(N). By reactive magnetron-sputtering it is possible to produce thin iron nitride films of various stoichiometries. We report on the production of epsilon-FexN and FeNy films. These films were again characterized by CEMS, RBS, RNRA (N-15(p, alpha gamma)) and XRD. For epsilon-FexN, produced in the range 2 less than or equal to x less than or equal to 3 with medium nitrogen flows during reactive sputtering, the Mossbauer spectra can be well resolved in terms of different iron sites, enabling an accurate calculation of the nitrogen content. For high nitrogen flows during sputtering a phase FeNy with y > 0.5 is produced. This phase is not reported in the Fe-N phase diagram.
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页码:199 / 225
页数:27
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