STATIONARY DEPTH-PROFILING REFLECTOMETER BASED ON LOW-COHERENCE INTERFEROMETRY

被引：4

作者：

KNUTTEL, A

SCHMITT, JM

机构：

[1] National Institutes of Health, Bethesda

来源：

OPTICS COMMUNICATIONS | 1993年 / 102卷 / 3-4期

关键词：

D O I：

10.1016/0030-4018(93)90380-N

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Described is a new optical reflectometer based on low-coherence interferometry that employs no moving parts. Depth profiling up to a maximum free-space distance of 300 mum ( 150 mum depth) was achieved with a spatial resolution of 23 mum. In a proof-of-principle application, the thickness of a thin plastic film was determined.

引用

页码：193 / 198

页数：6

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