STATIONARY DEPTH-PROFILING REFLECTOMETER BASED ON LOW-COHERENCE INTERFEROMETRY

被引：4

作者：

KNUTTEL, A

SCHMITT, JM

机构：

[1] National Institutes of Health, Bethesda

来源：

OPTICS COMMUNICATIONS | 1993年 / 102卷 / 3-4期

关键词：

D O I：

10.1016/0030-4018(93)90380-N

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Described is a new optical reflectometer based on low-coherence interferometry that employs no moving parts. Depth profiling up to a maximum free-space distance of 300 mum ( 150 mum depth) was achieved with a spatial resolution of 23 mum. In a proof-of-principle application, the thickness of a thin plastic film was determined.

引用

页码：193 / 198

页数：6

共 50 条

[1] Measurement technique for surface profiling in low-coherence interferometry
Onodera, R
Wakaumi, H
Ishii, Y
OPTICS COMMUNICATIONS, 2005, 254 (1-3) : 52 - 57
[2] LOW-COHERENCE REFLECTOMETRY FOR STATIONARY LATERAL AND DEPTH PROFILING WITH ACOUSTOOPTIC DEFLECTORS AND A CCD CAMERA
KNUTTEL, A
SCHMITT, JM
KNUTSON, JR
OPTICS LETTERS, 1994, 19 (04) : 302 - 304
[3] Low-coherence interferometry with synthesis of coherence function
Teramura, Yuichi
Suzuki, Keiichi
Suzuki, Masayuki
Kannari, Fumihiko
Applied Optics, 1999, 38 (28): : 5974 - 5980
[4] DESIGN OF A PRECISION OPTICAL LOW-COHERENCE REFLECTOMETER
BOOSTER, DH
CHOU, H
HART, MG
MIFSUD, SJ
RAWSON, RF
HEWLETT-PACKARD JOURNAL, 1993, 44 (01): : 39 - &
[5] Low-coherence interferometry with synthesis of coherence function
Teramura, Y
Suzuki, K
Suzuki, M
Kannari, F
APPLIED OPTICS, 1999, 38 (28) : 5974 - 5980
[6] Sensitivity Enhancement for Low-Coherence Interferometry
Benitez, J.
Mora, J.
IEEE PHOTONICS TECHNOLOGY LETTERS, 2017, 29 (20) : 1735 - 1738
[7] Low-coherence interferometry by intensity correlation
R. Coisson
P.V. Hôi
P. Podini
B. Huy
V.D. Thinh
Applied Physics B, 2000, 71 : 905 - 907
[8] Low-coherence interferometry by intensity correlation
Coïsson, R
Hôi, PV
Podini, P
Huy, B
Thinh, VD
APPLIED PHYSICS B-LASERS AND OPTICS, 2000, 71 (06): : 905 - 906
[9] Dynamically enhanced low-coherence interferometry
Mitsui, Takahisa
Aoki, Kenichiro
REVIEW OF SCIENTIFIC INSTRUMENTS, 2018, 89 (09):
[10] Optical low-coherence reflectometer for measuring WDM components
NTT Opto-Electronics Laboratories, Tokai, Ibaraki-ken 319-1193, Japan
不详
IEEE Photonics Technol Lett, 7 (857-859):

← 1 2 3 4 5 →