ION-BEAM DEPOSITION OF SPECIAL FILM STRUCTURES

被引：133
|
作者：
WEISSMANTEL, C
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期
关键词：
D O I：
10.1116/1.570719
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：179 / 185
页数：7
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