ON THE ROLE OF SELF-INTERSTITIALS IN IMPURITY DIFFUSION IN SILICON

被引：28
|
作者：
FAIR, RB
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 11期
关键词：
D O I：
10.1063/1.327540
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：5828 / 5832
页数：5
相关论文
共 50 条
  • [21] Self-interstitials and related defects in irradiated silicon
    Gorelkinskii, Yu. V.
    Abdullin, Kh. A.
    Mukashev, B. N.
    Turmagambetov, T. S.
    PHYSICA B-CONDENSED MATTER, 2009, 404 (23-24) : 4579 - 4582
  • [22] EPR AND ENDOR OF CARBON AND SELF-INTERSTITIALS IN SILICON
    BROWER, KL
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1976, 21 (03): : 364 - 364
  • [23] HREM INVESTIGATIONS OF THE AGGLOMERATION OF SELF-INTERSTITIALS IN SILICON
    WERNER, P
    REICHE, M
    HEYDENREICH, J
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1993, 137 (02): : 533 - 541
  • [24] Self-interstitials generated on silicon bulk surface
    Kato, Yukihiro
    Fukuda, Ryoji
    Takeno, Yuta
    Shimozaki, Toshitada
    Okino, Takahisa
    PROGRESS IN NATURAL SCIENCE-MATERIALS INTERNATIONAL, 2011, 21 (01) : 17 - 20
  • [25] Modeling of the surface annihilation of excess self-interstitials generated by gold diffusion into silicon
    Stolwijk, NA
    Lerch, W
    Giese, A
    SEMICONDUCTOR PROCESS AND DEVICE PERFORMANCE MODELLING, 1998, 490 : 111 - 116
  • [26] Self-interstitials generated on silicon bulk surface
    Yukihiro KATO
    Ryoji FUKUDA
    Yuta TAKENO
    Toshitada SHIMOZAKI
    Takahisa OKINO
    Progress in Natural Science:Materials International, 2011, 21 (01) : 17 - 20
  • [27] Self-interstitials in silicon irradiated with light ions
    Mukashev, BN
    Abdullin, KA
    Gorelkinskii, YV
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1998, 168 (01): : 73 - 85
  • [28] ON AN ANALYTICAL SOLUTION FOR TWO-DIMENSIONAL DIFFUSION OF SILICON SELF-INTERSTITIALS DURING OXIDATION OF SILICON
    HAMASAKI, M
    SOLID-STATE ELECTRONICS, 1982, 25 (01) : 1 - 4
  • [29] DO SELF-INTERSTITIALS CONTRIBUTE TO SELF-DIFFUSION IN METALS
    GOSELE, U
    SCRIPTA METALLURGICA, 1985, 19 (01): : 93 - 98
  • [30] Generation of thermal donors in silicon: Effect of self-interstitials
    Voronkov, VV
    Voronkova, GI
    Batunina, AV
    Golovina, VN
    Mil'vidskii, MG
    Gulyaeva, AS
    Tyurina, NB
    Arapkina, LV
    PHYSICS OF THE SOLID STATE, 2000, 42 (11) : 2022 - 2029
12345