MATHEMATICAL-MODELING OF COLD-WALL CHANNEL CVD REACTORS

被引：33
|
作者：
HOLSTEIN, WL [1 ]
FITZJOHN, JL [1 ]
FAHY, EJ [1 ]
GILMOUR, PW [1 ]
SCHMELZER, ER [1 ]
机构：
[1] DUPONT CO,DEPT CENT RES & DEV,EXPTL STN,WILMINGTON,DE 19898
来源：
JOURNAL OF CRYSTAL GROWTH | 1989年 / 94卷 / 01期
关键词：
D O I：
10.1016/0022-0248(89)90612-X
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：131 / 144
页数：14
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