QUANTITATIVE-ANALYSIS OF THIN-FILMS BY DC ARC OPTICAL EMISSION-SPECTROSCOPY

被引：7
|
作者：
HOGREFE, AW
LOWRY, RK
机构：
来源：
APPLIED SPECTROSCOPY | 1978年 / 32卷 / 03期
关键词：
Compendex;
D O I：
10.1366/000370278774331332
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
SEMICONDUCTOR DEVICE MANUFACTURE
引用
收藏
页码：281 / 287
页数：7
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