QUANTITATIVE-ANALYSIS OF THIN-FILMS BY DC ARC OPTICAL EMISSION-SPECTROSCOPY

被引：7

|

作者：

HOGREFE, AW

LOWRY, RK

机构：

来源：

APPLIED SPECTROSCOPY | 1978年 / 32卷 / 03期

关键词：

Compendex;

D O I：

10.1366/000370278774331332

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

SEMICONDUCTOR DEVICE MANUFACTURE

引用

收藏

页码：281 / 287

页数：7

相关论文

共 50 条

[1] IR EMISSION-SPECTROSCOPY OF THIN-FILMS
BAUMGARTEN, E
SPECTROCHIMICA ACTA PART A-MOLECULAR AND BIOMOLECULAR SPECTROSCOPY, 1976, 32 (04) : 865 - 870
[2] EXPERIMENTS ON QUANTITATIVE-ANALYSIS METHODS FOR THIN-FILMS
KISHIDA, H
JOURNAL OF ELECTRON MICROSCOPY, 1978, 27 (04): : 378 - 379
[3] PROGRESS IN QUANTITATIVE-ANALYSIS OF THIN-FILMS USING AUGER-ELECTRON SPECTROSCOPY
HALL, PM
MORABITO, JM
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C291 - C291
[4] USE OF EMISSION-SPECTROSCOPY FOR WELDING ARC ANALYSIS
MILLS, GS
WELDING JOURNAL, 1977, 56 (03) : S93 - S96
[5] STUDY OF A ROTATING ARC BY EMISSION-SPECTROSCOPY
WEI, PSP
STEVENS, RL
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1973, (AUG26): : 30 - 30
[6] FT-IR EMISSION-SPECTROSCOPY AS A TOOL FOR STUDYING THIN-FILMS AND THERMAL-CHANGES IN SAMPLES
COMPTON, SV
POWELL, JR
COMPTON, DAC
7TH INTERNATIONAL CONFERENCE ON FOURIER TRANSFORM SPECTROSCOPY, 1989, 1145 : 283 - 285
[7] QUANTITATIVE-ANALYSIS BY FTIR - THIN-FILMS OF COPOLYMERS OF ETHYLENE AND VINYL-ACETATE
MATHIAS, LJ
HANKINS, MG
BERTOLUCCI, CM
GRUBB, TL
MUTHIAH, J
JOURNAL OF CHEMICAL EDUCATION, 1992, 69 (08) : A217 - A219
[8] EMISSION-SPECTROSCOPY OF REACTIVE LOW-VOLTAGE ION PLATING FOR METAL-OXIDE THIN-FILMS
ZARRABIAN, S
LEE, C
GUENTHER, KH
APPLIED OPTICS, 1993, 32 (28): : 5606 - 5611
[9] ANALYSIS OF SURFACES AND THIN-FILMS BY IR, RAMAN, AND OPTICAL SPECTROSCOPY
ALLARA, DL
ACS SYMPOSIUM SERIES, 1982, 199 : 33 - 47
[10] ANALYSIS OF SURFACES AND THIN-FILMS BY INFRARED, RAMAN AND OPTICAL SPECTROSCOPY
ALLARA, DL
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1981, 182 (AUG): : 3 - INDE

← 1 2 3 4 5 →