HIGH THROUGHPUT PUMPING OF DANGEROUS GASES WITH A MULTISTAGE ROOTS VACUUM PUMP

被引：2
|
作者：
HENNING, J
ROSSMANITH, E
STEINMULLER, J
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 04期
关键词：
D O I：
10.1116/1.571533
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1023 / 1026
页数：4
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