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- [21] Measurements of pulsed-power modulated argon plasmas in an inductively coupled plasma source JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (02): : 391 - 397
- [26] BEHAVIOR OF NITROGEN EXCITED IN AN INDUCTIVELY COUPLED ARGON PLASMA JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 1978, 19 (01): : 83 - 91