LIQUID-PHASE EPITAXIAL REFILL OF SILICON GROOVES

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作者：

BALIGA, BJ ^{[1
]}

机构：

[1] GE,CTR CORP RES & DEV,SCHENECTADY,NY 12301

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1979年 / 126卷 / 08期

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中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

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页码：C370 / C370

页数：1

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