CATHODE SPUTTERING IN HOLLOW CATHODE DISCHARGES

被引：35
|
作者：
MUSHA, T
机构：
来源：
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 1962年 / 17卷 / 09期
关键词：
D O I：
10.1143/JPSJ.17.1440
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：1440 / &
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