DISLOCATION PINNING EFFECT OF OXYGEN-ATOMS IN SILICON

被引:117
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作者
HU, SM [1 ]
机构
[1] IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
关键词
D O I
10.1063/1.89580
中图分类号
O59 [应用物理学];
学科分类号
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页码:53 / 55
页数:3
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