CLUSTERING OF OXYGEN-ATOMS AROUND CARBON IN SILICON

被引：31
|
作者：
FRAUNDORF, P
FRAUNDORF, GK
SHIMURA, F
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 11期
关键词：
D O I：
10.1063/1.335584
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：4049 / 4055
页数：7
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