ORGANIC RESIST MATERIALS FOR MICROELECTRONIC DEVICE FABRICATION

被引：0
|
作者：
WILLSON, CG [1 ]
机构：
[1] IBM,ALMADEN RES CTR,SAN JOSE,CA 95120
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1987年 / 193卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：3 / ACSC
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