EXAFS DETERMINATION OF THE LOCAL ATOMIC ORDER OF A METAL METALLOID ALLOY FORMED BY ION-IMPLANTATION

The local atomic order of a Ni-B alloy formed by ion implantation is investigated by EXAFS and the results compared to RBS and channeling data recorded on the same samples. The quite similar variation of the fraction of disordered (amorphous) volume in the implanted layer obtained in both types of experiments demonstrates that EXAFS provides a quantitative tool to measure the degree of disorder present in a crystalline sample. The results also reinforce at a microscopial level the previsions of a model developed previously to account for the amorphization process. © 1990.