COMPOSITION AND PROPERTIES OF SINX FILMS PRODUCED BY REACTIVE RF MAGNETRON SPUTTERING

被引：13
|
作者：
QIU, X
GYARMATI, E
机构：
来源：
THIN SOLID FILMS | 1987年 / 151卷 / 02期
关键词：
D O I：
10.1016/0040-6090(87)90236-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：223 / 233
页数：11
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