GROWTH OF NIO AND SIO2 THIN-FILMS

被引：28
|
作者：
ATKINSON, A
机构：
来源：
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1987年 / 55卷 / 06期
关键词：
D O I：
10.1080/13642818708218370
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：637 / 650
页数：14
相关论文
共 50 条
  • [21] DEPOSITION OF SIO2 THIN-FILMS BY REACTIVE EXCIMER LASER ABLATION
    TSUJI, M
    ITOH, N
    NISHIMURA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (08): : 2536 - 2539
  • [22] NON-EQUILIBRIUM WATER PERMEATION IN SIO2 THIN-FILMS
    PFEFFER, R
    LUX, R
    BERKOWITZ, H
    LANFORD, WA
    BURMAN, C
    JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) : 4226 - 4229
  • [23] CHARACTERIZATION OF INTERFACE STATES IN THIN-FILMS OF THERMALLY GROWN SIO2
    CAMPABADAL, F
    AYMERICHHUMET, X
    SERRAMESTRES, F
    VACUUM, 1984, 34 (10-1) : 1005 - 1007
  • [24] ELECTRON-BEAM-INDUCED CONDUCTION IN SIO2 THIN-FILMS
    TAYLOR, DM
    MEHDI, QH
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1979, 12 (12) : 2253 - 2262
  • [25] SYNTHESIS OF SIO2 THIN-FILMS BY REACTIVE EXCIMER LASER ABLATION
    FOGARASSY, E
    SLAOUI, A
    FUCHS, C
    STOQUERT, JP
    APPLIED SURFACE SCIENCE, 1992, 54 : 180 - 186
  • [26] RADIATION ENHANCED ADHESION OF INSULATING THIN-FILMS ON SIO2 SUBSTRATES
    SOFIELD, CJ
    TREHAN, PN
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1986, 98 (1-4): : 35 - 38
  • [27] ATTENUATION LENGTH OF PHOTOELECTRONS IN THIN-FILMS OF SIO2 GROWN ON SI
    PEISNER, J
    ASZODI, G
    NEMETHSALLAY, M
    FORGACS, G
    THIN SOLID FILMS, 1976, 36 (01) : 251 - 255
  • [28] ELABORATION OF SIO2 THIN-FILMS BY OXIDATION ASSISTED BY ELECTRON BUNDLES
    VILOTITCH, B
    SIBAI, A
    DUPUY, JC
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1985, 40 (227): : 345 - 348
  • [29] SUPERFICIAL-ENHANCED THERMAL NITRIDATION OF SIO2 THIN-FILMS
    GLACHANT, A
    BALLAND, B
    RONDA, A
    BUREAU, JC
    PLOSSU, C
    JOURNAL DE PHYSIQUE, 1988, 49 (C-4): : 413 - 416
  • [30] RELAXATION OF SIGE THIN-FILMS GROWN ON SI/SIO2 SUBSTRATES
    LEGOUES, FK
    POWELL, A
    IYER, SS
    JOURNAL OF APPLIED PHYSICS, 1994, 75 (11) : 7240 - 7246
12345