MICROWAVE PROPERTIES OF FREESTANDING DIELECTRIC FILMS

被引:15
|
作者
ROBERTSON, WM [1 ]
ARJAVALINGAM, G [1 ]
HOUGHAM, G [1 ]
KOPCSAY, GV [1 ]
EDELSTEIN, D [1 ]
REE, MH [1 ]
CHAPPLESOKOL, JD [1 ]
机构
[1] IBM CORP,CTR SEMICOND RES & DEV,HOPEWELL JUNCTION,NY 12533
关键词
DIELECTRICS AND DIELECTRIC DEVICES; MICROWAVE MEASUREMENT; SPECTROSCOPY;
D O I
10.1049/el:19920039
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Measurement of the broadband (15-150 GHz) microwave dielectric properties of free-standing films is demonstrated using the technique of coherent microwave transient spectroscopy. The accuracy of the method is verified by experiments on a fused silica sheet whose dielectric properties are well known. Results of measurements on (approximately 200-mu-m thick) polymer films are presented.
引用
收藏
页码:62 / 63
页数:2
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