THERMODYNAMIC ANALYSIS OF THE DEPOSITION OF SNO2 THIN-FILMS FROM THE VAPOR-PHASE

被引：29
|
作者：
ADVANI, GN
JORDAN, AG
LUPIS, CHP
LONGINI, RL
机构：
[1] CARNEGIE MELLON UNIV, CTR JOINING MAT, PITTSBURGH, PA 15213 USA
[2] CARNEGIE MELLON UNIV, DEPT MET & MAT SCI, PITTSBURGH, PA 15213 USA
来源：
THIN SOLID FILMS | 1979年 / 62卷 / 03期
关键词：
D O I：
10.1016/0040-6090(79)90012-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：361 / 368
页数：8
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