COERCIVITY OF ION-IMPLANTED COBALT FILMS

被引:1
|
作者
UNKROTH, A [1 ]
ANDRA, W [1 ]
机构
[1] ACAD SCI GDR,INST PHYS TECH,DDR-6900 JENA,GER DEM REP
来源
关键词
Films--Ion Implantation;
D O I
10.1002/pssa.2211090247
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This note reports on the coercivities of Co-P and Co-Si films produced by phosphorus or silicon ion implantation into Co layers. Experimental results show that the coercivity of Co films can be raised by implantation of a second element. After a succeeding heat treatment the coercivity could be enhanced to a value well above 80 kA/m (1000 Oe).
引用
收藏
页码:K149 / K152
页数:4
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