BENCHMARK TO SELL FOCUS MONITOR RETICLE

被引:0
|
作者
DUNN, PN
机构
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:38 / &
相关论文
共 50 条
  • [41] Towards a Group Encryption Scheme Benchmark: A View on Centralized Schemes with Focus on IoT
    Prantl, Thomas
    Ten, Peter
    Ifflander, Lukas
    Herrnleben, Stefan
    Dmitrenko, Alexandra
    Kounev, Samuel
    Krupitzer, Christian
    PROCEEDINGS OF THE ACM/SPEC INTERNATIONAL CONFERENCE ON PERFORMANCE ENGINEERING (ICPE '21), 2021, : 233 - 240
  • [42] EDMF: A New Benchmark for Multi-Focus Images with the Challenge of Exposure Difference
    Li, Hui
    Shen, Tianyu
    Zhang, Zeyang
    Zhu, Xuefeng
    Song, Xiaoning
    SENSORS, 2024, 24 (22)
  • [43] Phase Shift Focus Monitor for OAI and High NA Immersion Scanners
    Kuo, H. M.
    Peng, R. C.
    Liu, H. H.
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVIII, 2014, 9050
  • [44] Optimization of the focus monitor mark in immersion lithography according to illumination type
    Dong, Lisong
    Zhang, Libin
    Su, Xiaojing
    He, Jianfang
    Wei, Yayi
    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2017, 16 (03):
  • [45] Image auto-focus system based on remote web monitor
    Chen Guojin
    Zhu Miaofen
    Qiu Xiaoguang
    2007 IEEE INTERNATIONAL WORKSHOP ON IMAGING SYSTEMS AND TECHNIQUES, 2007, : 91 - +
  • [46] Analytical tools to monitor exocytosis: a focus on new fluorescent probes and methods
    Keighron, Jacqueline D.
    Ewing, Andrew G.
    Cans, Ann-Sofie
    ANALYST, 2012, 137 (08) : 1755 - 1763
  • [47] Performance of the beam position monitor system of the final focus test beam
    Smith, S.
    Tenenbaum, P.
    Williams, S.H.
    Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1999, 431 (01): : 9 - 26
  • [48] Performance of the beam position monitor system of the final focus test beam
    Smith, S
    Tenenbaum, P
    Williams, SH
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 431 (1-2): : 9 - 26
  • [49] Automatic in-situ focus monitor using line shortening effect
    Kim, YC
    Yeo, GS
    Lee, JH
    Kim, H
    Chung, UI
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XIII, PTS 1 AND 2, 1999, 3677 : 184 - 193
  • [50] Probe-pattern grating focus monitor through scatterometry calibration
    Xue, Jing
    Spanos, Costas J.
    Neureuther, Andrew R.
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXII, PTS 1 AND 2, 2008, 6922 (1-2):