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- [41] Towards a Group Encryption Scheme Benchmark: A View on Centralized Schemes with Focus on IoT PROCEEDINGS OF THE ACM/SPEC INTERNATIONAL CONFERENCE ON PERFORMANCE ENGINEERING (ICPE '21), 2021, : 233 - 240
- [43] Phase Shift Focus Monitor for OAI and High NA Immersion Scanners METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVIII, 2014, 9050
- [44] Optimization of the focus monitor mark in immersion lithography according to illumination type JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2017, 16 (03):
- [45] Image auto-focus system based on remote web monitor 2007 IEEE INTERNATIONAL WORKSHOP ON IMAGING SYSTEMS AND TECHNIQUES, 2007, : 91 - +
- [47] Performance of the beam position monitor system of the final focus test beam Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1999, 431 (01): : 9 - 26
- [48] Performance of the beam position monitor system of the final focus test beam NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 431 (1-2): : 9 - 26
- [49] Automatic in-situ focus monitor using line shortening effect METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XIII, PTS 1 AND 2, 1999, 3677 : 184 - 193
- [50] Probe-pattern grating focus monitor through scatterometry calibration METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXII, PTS 1 AND 2, 2008, 6922 (1-2):