FABRICATION OF LARGE-DIAMETER, HIGH-ASPECT-RATIO GLASS MICROBALLOON TARGETS FOR LASER FUSION-RESEARCH

被引：8
|
作者：
NORIMATSU, T
TAJIMA, H
TAKAGI, M
NAKAI, S
YAMANAKA, C
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1988年 / 6卷 / 04期
关键词：
D O I：
10.1116/1.575545
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2552 / 2555
页数：4
相关论文
共 38 条
  • [31] Fabrication of densely packed, well-ordered, high-aspect-ratio silicon nanopillars over large areas using block copolymer lithography
    Gowrishankar, Vignesh
    Miller, Nathaniel
    McGehee, Michael D.
    Misner, Matthew J.
    Ryu, Du Yeol
    Russell, Thomas P.
    Drockenmuller, Eric
    Hawker, Craia J.
    THIN SOLID FILMS, 2006, 513 (1-2) : 289 - 294
  • [32] Fabrication of high-aspect-ratio poly(2-hydroxyethyl methacrylate) brushes patterned on silica surfaces by very-large-scale integration process
    Chen, Jem-Kun
    Chen, Tsung-Yen
    JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2011, 355 (02) : 359 - 367
  • [33] Fabrication of large arrays of high-aspect-ratio single-crystal silicon columns with isolated vertically aligned multi-walled carbon nanotube tips
    Velasquez-Garcia, L. F.
    Akinwande, A. I.
    NANOTECHNOLOGY, 2008, 19 (40)
  • [34] Single-Mask, Flip-Bonded Titanium-On-Glass (FBTOG) Technology for Wafer-Level Batch Fabrication of Suspended High-Aspect-Ratio Bulk Titanium Microstructures
    Zhang, Y.
    Zhao, G.
    Shu, Q.
    Tian, Y.
    Li, W.
    Chen, J.
    PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 758 - 761
  • [35] Fabrication of high-aspect-ratio, sub-micron gratings in AlGaInP/GaAs laser structures using a BCl3/Cl2/Ar inductively coupled plasma
    Edwards, G. T.
    Sobiesierski, A.
    IWestwood, D.
    Smowton, P. M.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2007, 22 (09) : 1010 - 1015
  • [36] Fabrication of high-aspect-ratio InP-based vertical-cavity laser mirrors using CH4/H2/O2/Ar reactive ion etching
    Schramm, Jeff E.
    Babic, Dubravko I.
    Hu, Evelyn L.
    Bowers, John E.
    Merz, James L.
    Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1997, 15 (06):
  • [37] Fabrication of high-aspect-ratio InP-based vertical-cavity laser mirrors using CH4/H2/O2/Ar reactive ion etching
    Schramm, JE
    Babic, DI
    Hu, EL
    Bowers, JE
    Merz, JL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06): : 2031 - 2036
  • [38] High-quality fabrication of diamond straight microchannels heat sink with large aspect ratio microchannels using UV nanosecond laser based on multi-feed method
    Cui, Jianlei
    Kang, Haozhe
    Dou, Jian
    Dong, Xiangyang
    Wang, Zhijun
    Fan, Zhengjie
    Wang, Wenjun
    Mei, Xuesong
    OPTICS AND LASER TECHNOLOGY, 2024, 171
1234