NEW LENSES FOR MICROLITHOGRAPHY

被引：0

|

作者：

GLATZEL, E ^{[1
]}

机构：

[1] MATH ABT,D-7082 OBERKOCHEN,FED REP GER

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1980年 / 70卷 / 08期

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中图分类号：

O4 [物理学];

学科分类号：

0702 ;

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页码：1041 / 1041

页数：1

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