X-RAY-IMAGING OF NANOSTRUCTURE PATTERNS

被引：12
|
作者：
VLADIMIRSKY, Y [1 ]
KERN, D [1 ]
MEYERILSE, W [1 ]
ATTWOOD, D [1 ]
机构：
[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,CTR X-RAY OPT,BERKELEY,CA 94720
来源：
APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 03期
关键词：
D O I：
10.1063/1.100990
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：286 / 288
页数：3
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